The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 30, 1997

Filed:

Jul. 08, 1994
Applicant:
Inventors:

James Alexander McHenry, Washington, NJ (US);

Harry William Deckman, Clinton, NJ (US);

Edward William Corcoran, Jr, Easton, PA (US);

Wenyih Frank Lai, Fair Lawn, NJ (US);

Horst Witzke, Flemington, NJ (US);

Assignee:

Exxon Research & Engineering Company, Florham Park, NJ (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
4272553 ; 4272551 ; 4272552 ; 4272481 ;
Abstract

The instant invention is directed toward a process for enhancing the permselective properties, selectively sealing defects and pinholes, controllably altering the pore size and stabilizing the permselective properties of articles having apperatures therein comprising the steps of: simultaneously contacting an article having a first and second surface, said first and second surfaces being capable of passing ozone and silicon compounds therethrough and said first and second surfaces being oriented such that said silicon compounds and ozone can react across said first and second surfaces, with ozone on said first surface and a silicon compound on said second surface and wherein said contacting is conducted for a time and at a temperature and pressure sufficient to allow said ozone and said silicon compound to form a silicon oxide.


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