The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 16, 1997

Filed:

Oct. 02, 1995
Applicant:
Inventors:

Terry L Rohde, Delray Beach, FL (US);

Kenneth D Kurtz, West Palm Beach, FL (US);

Assignee:

Motorola, Inc., Schaumburg, IL (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
228 495 ; 269 21 ;
Abstract

The present invention provides a workstation for processing a flexible membrane (16). A frame (14) defines an opening (24) adapted to receive and support the flexible membrane (16). A platform (12) supports and heats the flexible membrane (16) during processing. The platform (12) includes a membrane-support surface (20) and a frame-support surface (18) about the membrane-support surface (20) for engaging the lower surface (38) during processing. The frame-support surface (18) is axially spaced apart from the membrane-support surface (20) such that engagement with the membrane-support surface (20) causes disengagement of the flexible membrane (16) from frame (14). The platform (12) further includes vacuum means (22) for urging the flexible membrane (16) against the membrane-support surface (20) and heating means for heating the platform (12). This heats the flexible membrane (16) resting on the membrane-support surface (20) and also heats the frame (14) resting on the frame-support surface (18).


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