The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 1997
Filed:
Jul. 27, 1994
Mitsuo Kobayashi, Kanagawa, JP;
Katsumichi Ueyanagi, Kanagawa, JP;
Fuji Electric Co., Ltd., Kanagawa, JP;
Abstract
A semiconductor capacitive acceleration sensor is configured so that it can be constructed in a small size, it has a high detection sensitivity, and the detection output characteristic is linear. The sensor comprises a semiconductor substrate 1; supporters 21A to 21D each of which is made of a conductive semiconductor, and which are disposed on the upper face of the semiconductor substrate 1 through an insulating layer 1A so as to be placed at positions corresponding to corners of a quadrilateral; beams 26A to 26D which respectively have ends connected with the supporters, which coincide with each other when the beams are rotated, and which elongate in the side directions of the quadrilateral; a movable electrode 23 which has a quadrilateral shape, and which is disposed so as to be separated from the beams by a predetermined distance; connectors 27A to 27D which respectively connect the movable electrode 23 with the beams; and a stationary electrode 31 which is disposed so as to be separated from the lower face of the movable electrode 23 by a predetermined distance.