The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 1997
Filed:
Sep. 14, 1995
Applicant:
Inventors:
Akira Nishiuchi, Chiyoda-machi, JP;
Masahiro Mase, Nogi-machi, JP;
Noboru Matsumura, Chiyoda-machi, JP;
Katsuaki Kikuchi, Tsuchiura, JP;
Takashi Nagaoka, Tsukuba, JP;
Assignee:
Hitachi, Ltd., , JP;
Primary Examiner:
Int. Cl.
CPC ...
F01D / ;
U.S. Cl.
CPC ...
415 90 ; 415143 ;
Abstract
A dry turbo vacuum pump has a multistage circumferential impeller supported on a shaft, and a stator which cooperates with it to form a multistage peripheral flow pump. A centrifugal pump arranged at an inlet side of the peripheral flow pump is also mounted on the same shaft, so that gas sucked from the inlet is discharged to the atmosphere from the peripheral flow pump. The multistage peripheral flow pump and at least one stage of the centrifugal pump are integrated.