The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 02, 1997

Filed:

Mar. 11, 1996
Applicant:
Inventors:

Motonori Kanaya, Omiya, JP;

Kazuyoshi Yamasaki, Omiya, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356376 ; 356373 ; 2502 / ; 25055937 ; 2502221 ;
Abstract

In an optical apparatus utilizing moire fringes to inspect surface irregularities of a test object, a single light beam forms a light beam network in an optical sensor (28) such that the test object can be two-dimensionally detected, thereby preventing the test object from abnormally approaching a moire grating (12). The light beam is reflected between a pair of mirrors (50, 52) a plurality of times within an identical plane and then the optical sensor (28) detects the intensity of the light beam. The optical sensor (28) is disposed such that the light beam network is positioned directly below the moire grating (12). Accordingly, a test object (2) abnormally approaching the moire grating (12) can be two-dimensionally detected by the light beam network, thereby improving the accuracy in detection.


Find Patent Forward Citations

Kanaya, Motonori. (1997). Optical sensor and optical apparatus using the same (U.S. Patent No. 5663796). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5663796

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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