The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 1997
Filed:
Jul. 20, 1995
Hiroshi Suganuma, Ibaragi, JP;
Sony Corporation, Tokyo, JP;
Abstract
A light exposure and illuminating device in which an outgoing light of an exposure light source is supplied to a light exposure section for illuminating an object to be exposed to light. A moving scattering medium scatters a laser beam outgoing from a laser light source. A light condenser lens condenses the laser beam scattered by the moving scattering medium to a laser beam of a suitable diameter. A plurality of prisms condense the laser light condensed by the light condenser lens as a rectangle of a suitable size on an incident surface of a fly-eye lens. The fly-eye lens uniforms the intensity distribution of the laser beam in cooperation with a folding lens. Another condenser lens radiates the laser beam uniformed in intensity distribution by the fly-eye lens and the firstly-stated condenser lens as a exposure illuminating light on a mask for light exposure on which a light exposure pattern is pre-formed. With the present light exposure illuminating device, a small-sized inexpensive light source may be realized. In addition, the illuminating light is uniform and free of fluctuations or speckles, while a high light source utilization efficiency may be achieved.