The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 26, 1997

Filed:

Mar. 14, 1996
Applicant:
Inventors:

Blasius Brezoczky, San Jose, CA (US);

Vladimir Pogrebinsky, San Jose, CA (US);

Assignee:

Phase Metrics, Inc., San Diego, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356353 ; 356359 ; 356374 ;
Abstract

An automatic surface inspection apparatus comprises a light source that provides a coherent light beam that is spit and then recombined in a prism to generate an interference pattern. A cylindrical lens projects the interference pattern onto the surface of a disk as a line of light. A linear detection array converts the reflected line of light into an electrical signal that has a magnitude which varies dependent upon the reflected light intensity. Defects present on the surface of the disk cause variations in the reflected light intensity manifested as differences in the electrical signal output by the detection array.


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