System and method for analyzing conductor formation processes

Abstract

A centralized computer system in communication with a measurement system including a multi-point probe is programmed to analyze a plurality of conductor formations on a particular substrate, store information relating to an electrical characteristic of each conductor formation analyzed, and generate a report including information as to the variance in the electrical characteristic as a function of substrate position. To step through all of the conductor formations on a particular substrate, the computer may either be programmed to move a chuck holding the substrate under test relative to the points of the probe, or the system may include switching means disposed in an electrical path between the points of the probe and the resistance measurement system, enabling the computer to step through all of the conductor formations on a particular substrate by instructing the switching means to select points associated with only a single conductor formation for connection to the resistance measurement system. The system preferably further includes an imaging system interfaced to the chuck and computer to identify a visual target on the substrate and align the substrate relative to the points of the probe to ensure proper contact therebetween.