The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 1997
Filed:
Aug. 09, 1995
Applicant:
Inventor:
Tokudai Neda, Tokyo, JP;
Assignee:
Tokyo Gas Co., Ltd., Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01F / ;
U.S. Cl.
CPC ...
7320426 ;
Abstract
A thermal micro flow sensor including a heating wire, said heating wire being made of a material having a resistivity in the range from 3.1.times.10.sup.-7 .OMEGA.m to 2.times.10.sup.-2 .OMEGA.m like polysilicon so that said heating wire has a resistance about 1 k.OMEGA., said heating wire being formed on a semiconductor material so that said heating wire has a thermal isolation structure for isolating said heating wire from said semiconductor substrate.
Neda, Tokudai. (1997). Thermal micro flow sensor and production method thereof (U.S. Patent No. 5656773). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5656773
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile