The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 1997
Filed:
Mar. 22, 1995
Applicant:
Inventors:
Assignee:
Futaba Denshi Kogyo K.K., Mobara, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ; H01J / ;
U.S. Cl.
CPC ...
4272552 ; 427 77 ; 427101 ; 445 50 ; 445 51 ; 438 20 ; 438384 ;
Abstract
A resistive element is provided which is used on a cathode conductor side of a field emission type fluorescent display device and made of a hydrogenated amorphous silicon film. Nitride is added during deposition of the hydrogenated amorphous silicon film containing an impurity for controlling resistivity of the film. A method for producing the resistive element and an apparatus therefor are also disclosed.