The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 1997
Filed:
Aug. 08, 1996
Balzers Aktiengesellschaft, Furstentum, LI;
Abstract
Vacuum processing plant with a small footprint for the surface treatment of large-area substrates in a virtually upright position, has a vacuum chamber containing a substrate carrier rotatable about a central axis and with at least one processing station mounted on its periphery. A transfer chamber is also mounted on its periphery and connects it to a load-lock chamber. A first transport mechanism moves the substrates from the transfer chamber in a radial direction in and out of the vacuum chamber, a second transport mechanism moves the substrates in a direction perpendicular to that of the first transport mechanism, between the transfer chamber and the load-lock chamber. A third transport mechanism moving in parallel with the second one doubles the transport capacity between the load-lock chamber and the transfer chamber.