The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 05, 1997

Filed:

Jun. 26, 1995
Applicant:
Inventor:

Yasuaki Hokari, Tokyo, JP;

Assignee:

NEC Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
257222 ; 257432 ; 257644 ;
Abstract

A solid state image picking-up device such as a charge coupled device (CCD) includes a channel region and a photo-diode region formed on a semiconductor region apart from each other, a first insulating film formed on the semiconductor region including the channel region and the second semiconductor region to have a concave portion above the photo-diode region, and a charge transfer electrode interposed in said first insulating film and extending over the channel region and a region between the channel region and the photo-diode region. A light shielding film is formed on the first insulating film over the channel region and a second insulating film is formed on the light shielding film and the first insulating film. A protection film composed of BPSG or PSG is formed to fill the concave portion on the second insulating film. A third insulating film is formed on the protection film and a flattening resin film is formed on the third insulating film. The protection film is formed of a BPSG film containing P.sub.2 O.sub.5 and B.sub.2 O.sub.3 with the total density of 5 mol % or above or a PSG film containing P.sub.2 O.sub.5 with the density of 5 mol % or above.


Find Patent Forward Citations

Hokari, Yasuaki. (1997). Charge coupled device with filling film and method of manufacture thereof (U.S. Patent No. 5654565). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5654565

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…