The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 1997
Filed:
Jul. 08, 1996
Toshio Komuro, Tokyo, JP;
NEC Corporation, , JP;
Abstract
In a method for manufacturing a 'BiCMOS' semiconductor integrated circuit, a gate oxide film 110 and a polysilicon film are grown on a semiconductor substrate, and after phosphorus is doped, the polysilicon film is patterned to form gate electrodes 112a and 112b and an emitter electrode 112c. A heat treatment is performed to form an emitter diffused region 113. Phosphorus and boron are selectively implanted with a low impurity concentration, respectively, to form a LDD N.sup.- region 114 and a LDD P.sup.- region 115. Thereafter, a side wall 116 is formed, and boron is implanted into areas B and C so as to form P.sup.+ source/drain regions 117 and a graft base region 18, respectively. Phosphorus is implanted to form N.sup.+ source/drain regions 119.