The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 29, 1997

Filed:

Aug. 30, 1995
Applicant:
Inventors:

Min-Chung Jon, Princeton Junction, NJ (US);

Hugh Nicholl, Berthoud, CO (US);

Peter Hartpence Read, Morrisville, PA (US);

Assignee:

Lucent Technologies Inc., Murray Hill, NJ (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B / ;
U.S. Cl.
CPC ...
134 31 ; 134-6 ; 134-7 ; 134-9 ; 134 26 ; 134 72 ; 134902 ; 451 38 ; 451 39 ; 451 75 ; 451 78 ;
Abstract

An object (12) may be cleaned by CO.sub.2 reduced ESD by directing a first water mist (23) at a surface (14) of the object while imparting a relative motion between the object board and the mist to form a film of water on the object surface. As the relative motion is imparted between the board and the first mist (23), a second water mist (32) is injected into a stream (30) of solid CO.sub.2 particles (27) directed at the object surface downstream of the first mist. Water droplets in the second mist in the second mist combine with the CO.sub.2 particles to create carbonic acid that disassociates into charged ions that increase the conductivity of the water film, allowing for increased charge dissipation, thus reducing the incidence of ESD.


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