The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 1997
Filed:
Apr. 13, 1994
Applicant:
Inventors:
Erik J Bjornard, Northfield, MN (US);
Eric W Kurman, Northfield, MN (US);
David A Shogren, Lakeville, MN (US);
Jeffrey J Hoffman, Inver Grove Heights, MN (US);
Assignee:
Viratec Thin Films, Inc., Faribault, MN (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B / ; B24C / ; B24C / ;
U.S. Cl.
CPC ...
451 39 ; 451 81 ; 451 87 ; 451 89 ; 451 99 ;
Abstract
A method and apparatus for cleaning a substrate in preparation for thin film coating. The invention involves cleaning the substrate in a cleaning chamber under controlled conditions by a blast of carbon dioxide pellets suspended in and transported by a compressed gas medium.
Bjornard, Erik. (1997). Method and apparatus for cleaning substrates in preparation for (U.S. Patent No. 5651723). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5651723
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile