The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 1997
Filed:
Oct. 12, 1995
Toshio Honda, Yotsukaido, JP;
Katsuyuki Okada, Chiba, JP;
Fuji Photo Optical Co., Ltd., Saitama, JP;
Honda, Toshio, Yotsukaido, JP;
Osaka, Katsuyuki, Chiba, JP;
Abstract
In a vibration-resistant interferometer, an interference fringe image obtained by an image capturing means is analyzed and an optical path difference between a reference light component and an object light component is maintained at a predetermined value with reference to the result of this analysis, thereby making its optical system simple in structure, easy to adjust, and inexpensive to manufacture and maintain. A Fizeau-type interferometer, a CCD camera for viewing an interference fringe, a computer for analyzing the interference fringe image information obtained by the CCD camera to calculate the shape of the sample surface or the amount of vibration or inclination of the sample surface, and a PZT driving circuit for transmitting predetermined driving signals to PZTs are provided.