The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 1997
Filed:
Feb. 08, 1996
Applicant:
Inventors:
Shigeo Itoh, Mobara, JP;
Teruo Watanabe, Mobara, JP;
Kazuhiko Tsuburaya, Mobara, JP;
Yoshihiko Hirata, Mobara, JP;
Susumu Takada, Tsukuba, JP;
Hiroshi Nakagawa, Tsukuba, JP;
Assignees:
Futaba Denshi Kogyo K.K., Mobara, JP;
Agency of Industrial Science and Technology, Tsukuba, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ; H01J / ; H01J / ; H01J / ;
U.S. Cl.
CPC ...
313310 ; 313309 ; 313336 ; 3133 / ; 313351 ;
Abstract
A field emission element including an electrode structure made of a thin film exhibiting increased adhesive strength. A thin film of niobium nitride (NbN) is formed on a glass substrate by sputtering or the like. The NbN film exhibits increased adhesive strength to a degree sufficient to prevent etching for formation of the film into electrodes from causing peeling of the film.