The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 1997
Filed:
Jun. 12, 1995
Applicant:
Inventor:
Yoshinori Sato, Yamato, JP;
Assignee:
Diafoil Hoechst Company, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B / ; B32B / ;
U.S. Cl.
CPC ...
428327 ; 428323 ; 428336 ; 428480 ;
Abstract
The disclosure describes a dry resist comprising: a biaxially oriented laminated polyester film whose surface layer on at least one side contains particles having an average particle diameter of 0.01 to 3.0 .mu.m, and has a center line average roughness of not less than 0.005 .mu.m and a maximum height of less than 1.5 .mu.m, and which has a haze of not more than 1.5%; a photoresist layer formed on said biaxially oriented laminated polyester film; and a protective film formed on said photoresist layer.