The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 1997
Filed:
Nov. 10, 1994
Applicant:
Inventor:
Tetsuzo Mori, Atsugi, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03B / ; G03B / ;
U.S. Cl.
CPC ...
355 68 ; 355 53 ;
Abstract
A scanning exposure apparatus includes a supplying system for supplying exposure light to a substrate to be scanned in a direction. The exposure light has a predetermined intensity distribution in the direction of scan, a detecting device for detecting the light quantity of the exposure light, and a control system for controlling the supplying system on the basis of the light quantity and the predetermined intensity distribution of the exposure light.