The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 1997
Filed:
Dec. 15, 1994
Applicant:
Inventor:
Kazushi Nakashima, Kasugai, JP;
Assignees:
Fujitsu Limited, Kanagawa, JP;
Fujitsu VLSI Limited, Aichi, JP;
Primary Examiner:
Int. Cl.
CPC ...
B08B / ;
U.S. Cl.
CPC ...
134-13 ; 134 26 ; 134 30 ;
Abstract
A method for cleaning an object involves the steps of treating an object by dipping the object in a cleaning liquid, rinsing the object with a rinse liquid having a first lower temperature for removing dust particles from the object, and rinsing the object subsequently using a rinse liquid having a second, higher temperature, for removing the cleaning liquid, wherein the first temperature is set such that no icing occurs on the dust particles.