The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 1997
Filed:
Jun. 03, 1996
Berndt Lahne, Jena, DE;
Klaus Schultz, Jena, DE;
Werner Scheler, Jena, DE;
Michael Heitmann, Jena, DE;
Axel Gaglin, Jena, DE;
Jenoptik GmbH, Jena, DE;
Abstract
A device for handling disk-shaped objects in a handling plane of a local clean room has the object of ensuring process steps preceding or following the processing and inspection of the disk-shaped objects under the conditions of a local clean room with the use of SMIF boxes. The handling plane (H--H) is in a fixed constructional relationship with a reference plane (E--E) of at least one device comprising the magazine seat as a component part, which device serves to index the shelves of magazines and disk-shaped objects contained therein and is arranged above an intermediate base dividing the clean room into two partial spaces located one above the other, in which an air flow component of an air flow is directed from the partial space above the intermediate base into the partial space below the intermediate base. The device can be used in the manufacture of integrated circuits, particularly for handling tasks.