The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 1997
Filed:
Nov. 04, 1994
Applicant:
Inventors:
Kazuo Okubo, Kawasaki, JP;
Masafumi Asai, Kawasaki, JP;
Assignee:
Fujitsu Limited, Kawasaki, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ; G01B / ; G06K / ;
U.S. Cl.
CPC ...
250310 ; 250307 ; 356398 ; 382144 ; 382149 ;
Abstract
A circuit pattern inspection device includes a stage on which circuit patterns to be inspected are arranged so as to be symmetrical about a center of the stage about which the stage can rotate, a plurality of sensors which are positioned with respect to the center and scan the circuit patterns, and a signal processing circuit which determines whether or not the circuit patterns are normal on the basis of output signals of the plurality of sensors.