The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 1997
Filed:
Feb. 07, 1995
Honda Giken Kogyo Kabushiki Kaisha, Tokyo, JP;
Abstract
A gas rate sensor comprising a sensor body, a pump control device and a resistive bridge circuit. Semiconductor substrates are accurately photoengraved by semiconductor fabrication techniques to integrally form a pair of heat-generating and heat-sensitive resistive elements, a gas passageway, a pump casing, and other components in the sensor body. The pump control device controls a piezoelectric pump for creating a gas flow. The resistive bridge circuit is composed of the aforementioned resistive elements and a pair of reference resistors. The pump control device sets the gas flow rate to a given value to detect only the angular velocity acting in the direction of yaw. The angular velocity can be detected accurately with high sensitivity.