The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 1997
Filed:
Nov. 28, 1995
Sang-Hwan Lee, Daejeon, KR;
Gwan-Chong Joo, Daejeon, KR;
Hong-Man Kim, Daejeon, KR;
Dong-Goo Kim, Daejeon, KR;
Electronics and Telecommunications Research Institute, Daejeon-shi, KR;
Korea Telecommunication Authority, Seoul, KR;
Abstract
A method for manufacturing self-aligned optic fiber-optic element coupling devices is described. The method comprises the steps of forming a first insulating film on a silicon substrate, forming metal pads on the first insulating film to have a predetermined separation distance, forming a second insulating film on the first insulating film and the metal pads, forming a photosensitive film to have first openings and a second opening, the first openings positioned on the metal pads with the metal pads partially covered with the second insulating films and the second opening positioned between the first openings on the first and second insulating films and extended to a side of the silicon substrate, removing the first and second insulating films exposed by the first and second openings using the photosensitive film as mask to exposure the silicon substrate and the metal pads, removing the photosensitive film, forming a V-shape groove in the exposed portion of the silicon substrate using the first and second insulating films as etching mask, and forming solder bumps on the metal pads.