The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 1997
Filed:
Jun. 26, 1992
Applicant:
Inventors:
Robert D Lorentz, North Oaks, MN (US);
Joseph H Sexton, Oakdale, MN (US);
Assignee:
Minnesota Mining and Manufacturing Company, St. Paul, MN (US);
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
2041921 ; 20429811 ; 264 86 ; 4273722 ;
Abstract
Coated shields useful in a sputtering deposition chamber comprise a binder and particles of the same material as the target. Application of the coating material to interior surfaces and appliances of the sputtering chamber reduces contamination of the sputtered material.