The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 03, 1997

Filed:

Feb. 08, 1996
Applicant:
Inventors:

Chantal Arena, Le Fontanil, FR;

Patrice Noel, Sassenage, FR;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05B / ; C23C / ;
U.S. Cl.
CPC ...
219466 ; 118725 ;
Abstract

A heating floor or plate for heating an object such as a substrate placed on its surface. A plate is provided whose surface temperature can be accurately adjusted so that the heat quantity supplied by two surface zones of the plate can be different even if the zones are small and contiguous. The plate has n zones, each having placed therein an electrically conducting heating element. n+1 sensors are used to measure the temperature of the plate, where n is an integer greater than 1. Data output from the sensors is processed and compared with at least one reference value and the result used to regulate the intensity of the current flowing in the elements based on the comparison.


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