The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 1997
Filed:
Oct. 27, 1995
Applicant:
Inventors:
Hidemitsu Aoki, Tokyo, JP;
Masaharu Nakamori, Tokyo, JP;
Koji Yamanaka, Saitama, JP;
Takashi Imaoka, Saitama, JP;
Takashi Futatsuki, Saitama, JP;
Yukinari Yamashita, Saitama, JP;
Assignees:
NEC Corporation, Tokyo, JP;
Organo Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C02F / ;
U.S. Cl.
CPC ...
205746 ; 205747 ; 205751 ; 205770 ; 204252 ; 204263 ; 204264 ; 204275 ; 204276 ; 134 28 ; 134109 ;
Abstract
Electric parts including semiconductor substrates, glass substrates and the like are washed with various cleaning solutions. After the cleaning, said parts are cleaned with either anolyte or catholyte electrolytic ionized water (EIW) produced from deionized water.