The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 1997
Filed:
Apr. 27, 1995
Seiichi Kato, Kakogawa, JP;
Ricoh Company, Ltd., Tokyo, JP;
Abstract
In a complementary MIS semiconductor device of a dual gate structure, an N-type polysilicon layer for an N-channel transistor and a P-type polysilicon layer for a P-channel transistor are formed on a gate oxide film and a field oxide film. A recessed portion is formed on the field oxide film in a region including a junctioning region of the N-type polysilicon layer and the P-type polysilicon layer such that thicknesses of the polysilicon layers are reduced. A continuous silicide layer is formed on the polysilicon layers. The silicide layer is thin in the recessed portion on the field oxide film and is thick on an active region of each of the transistors. In this semiconductor device of a dual gate type, it is possible to prevent impurities of the polysilicon layers of gate electrodes from being diffused in a transversal direction and restrain an increase in resistance value of each of the gate electrodes.