The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 27, 1997

Filed:

Jan. 17, 1995
Applicant:
Inventors:

Hiroshi Kikuchi, Zushi, JP;

Yasushi Sano, Yokohama, JP;

Satoru Todoroki, Yokohama, JP;

Hitoshi Oka, Yokohama, JP;

Toshiyuki Koshita, Mobara, JP;

Masato Kikuchi, Mobara, JP;

Mitsuo Nakatani, Mobara, JP;

Michio Tsukii, Mobara, JP;

Assignee:

Hitachi, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B / ; B08B / ; H01L / ;
U.S. Cl.
CPC ...
438 30 ; 134-13 ; 134-2 ; 134 38 ; 510176 ; 438951 ; 438158 ;
Abstract

A liquid crystal display device is produced by effecting in the course of its production steps a resist-peeling method including the steps of (a) changing the quality of a resist layer on a substrate, (b) contacting the changed resist with a liquid containing 2-amino-1-ethanol, and (c) removing the liquid containing the thus peeled resist from the surface of the etched resist, and optionally, (d) regenerating a liquid containing 2-amino-1-ethanol by distillation from the liquid used in step (c) and reusing the regenerated liquid in step (b).


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