The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 1997
Filed:
Dec. 30, 1994
Applicant:
Inventors:
Takashi Hiraga, Ibaraki, JP;
Tetsuo Moriya, Ibaraki, JP;
Assignees:
Research Development Corporation of Japan, Saitama, JP;
Agency of Industrial Science and Technology, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05D / ;
U.S. Cl.
CPC ...
427421 ; 427168 ; 427384 ; 4273855 ; 427426 ;
Abstract
A process for producing thin films includes a step of dissolving one or two or more thin film materials into solutions or dispersions that are sprayed respective spray nozzles provided for each component onto a substrate in a high vacuum vessel. The components are deposited on the substrate and then are heated.