The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 1997
Filed:
Feb. 13, 1995
Applicant:
Inventors:
Hideaki Miyamoto, Miyanohigashi-machi, JP;
Kohichi Ishikawa, Miyanohigashi-machi, JP;
Takeshi Kawano, Miyanohigashi-machi, JP;
Assignee:
STEC Inc., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118715 ; 118725 ; 118726 ;
Abstract
A liquid flow meter is connected in series with a vaporizer having a vaporizing function and a flow rate-adjusting function and vaporizing a liquid material supplied through said liquid flow meter to compare a flow rate detected by the liquid flow meter with a set value, whereby controlling a quantity of liquid material introduced into a vaporizing chamber provided in said vaporizer on the basis of this comparison result, and thus a flow rate of vaporized gas can be always stably controlled in high-speed response.