The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 1997
Filed:
Nov. 14, 1994
Applicant:
Inventor:
Shinichi Fukuzawa, Tokyo, JP;
Assignee:
NEC Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B / ; G02B / ; G03B / ;
U.S. Cl.
CPC ...
359627 ; 359857 ; 355 53 ; 355 67 ;
Abstract
A reduction projecting aligner preliminary forming an annular illumination light from a laser beam for increasing the illuminance transferred to the reticle and utilizing an annular illumination light that is obliquely incident on a reticle so that a pattern image of the reticle is rapidly printed on a photo-resist layer in high resolution.