The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 1997
Filed:
May. 31, 1995
Gregory A Magel, Dallas, TX (US);
James M Florence, Richardson, TX (US);
Robert M Boysel, Plano, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A spatial light modulator (40, 70, 80) operable in the analog mode for light beam steering or scanning applications. A deflectable mirror (42, 72) is supported by a torsion hinge (44) along a torsion axis. A plurality of flexure hinges (48) are provided to support the corners of the mirror (42, 72) and provide a restoration force. The combination of the torsion hinges and the flexure hinges realizes a deflectable pixel that is operable in the linear range for a large range of address voltages. The flexure hinges also maintain a flat undeflected state when no address voltage is applied, and prevent the pixel from collapsing. The pixel may be reinforced, such as about its perimeter (74) to ensure mirror flatness and prevent warping, even during extreme deflections of the mirror. The pixel is electrostatically deflected by applying an address voltage to an underlying address electrode (60).