The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 13, 1997

Filed:

Sep. 06, 1994
Applicant:
Inventors:

David L Gardell, Fairfax, VT (US);

David C Strippe, Westford, VT (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20429809 ; 20429819 ; 2042982 ;
Abstract

A high power capacity magnetron cathode has coolant fluid control surfaces attached to a supporting structure of a magnet array housed by a magnet array housing. The coolant fluid control surfaces provide radial and axial pumping and circulatory action of liquid coolant introduced into the magnet array housing throughout the housing and about the magnet array to significantly increase cooling efficiency by increasing distribution of coolant circulation. The fluid control surfaces may include fluid conductive vanes in patterns designed to maximize coolant flow. Fluid control surfaces and vanes are additionally provided on interior surfaces of the magnet array housing. The fluid control surfaces and vanes increase the surface area of the array and housing to increase the cooling action of the coolant at the bonding interface of cathode material to the magnet array housing, allowing the cathode to be operated at high power levels without thermal or pressure induced damage to the cathode bond. A non-flat configuration to the mating surfaces of the cathode material with the magnet array housing improves heat transfer away from the bonding layer of the cathode material.


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