The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 1997
Filed:
Jul. 31, 1995
Applicant:
Inventor:
Chia-Gee Wang, Millwood, NY (US);
Assignee:
Nanodynamics, Inc., Houston, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
378121 ; 378102 ;
Abstract
A compact x-ray tube assembly comprises an evacuated chamber enclosed by a ceramic tubular envelope, an attached power supply at one end connected to an emitter inside the chamber, electrostatic means for focusing a beam of electrons on a metal foil target, an end window at the other end comprising said target, the thickness and composition of the metal foil target and the e-beam energy being selected to generate a microfocused bright beam of x rays of a preselected energy. The compact assembly is useful in a method for aligning or positioning layers used in the production of microelectronics components.