The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 1997
Filed:
Feb. 16, 1995
Applicant:
Inventors:
Theodore F Fisher, Amherst, NY (US);
Yijian Jin, Tonawanda, NY (US);
Assignee:
Praxair Technology, Inc., Danbury, CT (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F25J / ;
U.S. Cl.
CPC ...
62625 ; 62918 ;
Abstract
A cryogenic system for the recovery of fluorine compounds from a carrier gas stream such as an effluent stream from a semiconductor facility comprising combining the carrier gas feed stream with additive liquid to keep fluorine compounds from solidifying and to reduce the vapor pressure of the fluorine compounds, followed by separation and recovery using a cryogenic rectification column system.