The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 1997
Filed:
Oct. 21, 1994
Applicant:
Inventors:
Matthew I Haller, San Francisco, CA (US);
Butrus T Khuri-Yakub, Palo Alto, CA (US);
Assignee:
The Board of Trustees of the Leland Stanford Jr. Univ., Stanford, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
B06B / ;
U.S. Cl.
CPC ...
367181 ; 367153 ; 367174 ; 381113 ; 381116 ; 381174 ; 381191 ;
Abstract
An electrostatic ultrasonic transducer formed on a semiconductor substrate by micro-machining wherein the transducer includes a silicon nitride membrane supported above the surface of the substrate by insulating supports; and the substrate and membrane define the electrodes of the transducer.