The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 1997
Filed:
Mar. 16, 1995
Manabu Watanabe, Kawasaki, JP;
Kazuaki Satoh, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
A thin film multi-layer structure includes a plurality of metal thin film layers, and a plurality of layers made of polyimide. The plurality of metal thin film layers and the plurality of layers made of polyimide are stacked in a predetermined order, the plurality of layers made of polyimide being grouped into a first group and a second group including at least a layer located at a top of the plurality of layers. A Young's modulus value of the polyimide of which each layer in the second group is made is less than that of the polyimide of which each layer in the first group is made and a thermal expansion coefficient of the polyimide of which each layer in the first group is made is less than that of the polyimide of which each layer in the second group is made.