The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 1997
Filed:
Nov. 21, 1994
Applicant:
Inventors:
Keiichi Sano, Osaka-fu, JP;
Yoichiro Aya, Osaka-fu, JP;
Assignee:
Sanyo Electric Co., Ltd., Osaka-fu, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ; H01L / ; H01L / ;
U.S. Cl.
CPC ...
257 52 ; 257 57 ; 257 55 ; 257 63 ;
Abstract
The content of bonding hydrogen in an a - SiGe film is so adjusted that in a case where the content of bonding hydrogen per Si atom in the film is in the range of approximately 8 to 14 at. %, [SiH.sub.2 ]/[Si] and [SiH]/[Si] are respectively in the ranges of approximately 0.5 to 4 at. % and approximately 7 to 10 at. %, and both [SiH.sub.2 ]/[Si] and [SiH]/[Si] increase at approximately equal slops as the content of bonding hydrogen increases.