Configuration measuring method and apparatus for optically detecting a

Abstract

Substantially collimated displacement detection light is led to a first lens and condensed by the first lens to proximities to a reflecting surface of a probe. The reflected light is displaced by an atomic force acting against a surface of a sample, where the reflected light varies in reflection angle according to the displacement. The displaced light is lead to the first lens, changed in direction by a mirror, and detected by magnifying the displacement of the probe. The detection further includes steps of moving a Z direction scan block in a direction vertical to the sample surface by a Z direction driving device, the Z direction scan block having the first lens and the probe, moving an X direction scan block in a first axial direction within a plane parallel to the sample surface by an X direction driving device, the X direction scan block having the Z direction scan block, the Z direction driving device, and the mirror, and moving a Y direction scan block by a Y direction driving device in a second axial direction perpendicular to the first axial direction within a plane parallel to the sample surface, the Y direction scan block having the X direction scan block, the X direction driving device, the detection light radiation system, and the displacement detection system.