The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 1997
Filed:
May. 09, 1995
Applicant:
Inventor:
Norman L Boling, Santa Rosa, CA (US);
Assignee:
Deposition Sciences, Inc., Santa Rosa, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ; C23C / ;
U.S. Cl.
CPC ...
20429808 ; 20419212 ; 20419222 ; 20419223 ; 20429819 ; 20429823 ; 20429824 ;
Abstract
An apparatus for reducing the intensity and frequency of arcing in a reactive DC sputtering process when the process uses an arc-suppression system which interrupts or reverses the voltage applied to the sputtering target. A plasma having required properties is introduced into the vicinity of the sputtering target by means of a separate plasma applicator which operates independently of the target.