The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 25, 1997

Filed:

Jun. 02, 1995
Applicant:
Inventor:

Koji Itoh, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03D / ;
U.S. Cl.
CPC ...
396578 ; 396626 ;
Abstract

A replenishing device is provided which comprises a replenishing tank for temporarily storing a replenishing processing chemical therein, a replenisher for supplying the replenishing processing chemical from the replenishing tank to a processing bath to replenish the processing bath with the replenishing processing chemical, a sensor for detecting whether a replenishing processing chemical of a quantity exceeding a first specified quantity remains within the replenishing tank, a display unit capable of displaying instructions for the supply of the replenishing processing chemical to the replenishing tank thereon, and a control device for causing the display unit to display the instructions when the control device judges, based on a quantity of a replenishing processing chemical added to the processing bath after the sensor has detected that a remaining quantity of the replenishing processing chemical in the replenishing tank has been brought to a level that is less than the first specified quantity, that the remaining quantity thereof is less than a second specified quantity. Thus, the replenishing processing chemical can be supplied to the replenishing tank before the replenishing processing chemical in the replenishing tank is completely empty, thereby making it possible to reduce interruptions of development processing and improve work efficiency.


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