The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 1997
Filed:
May. 24, 1995
Applicant:
Inventor:
Yumi Yoshida, Sagamihara, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
437-4 ; 136256 ; 136258 ; 136259 ; 20419229 ; 257436 ; 257458 ; 437-2 ; 437181 ; 437189 ;
Abstract
There is provided a method and apparatus for producing a photovoltaic device which is excellent in conversion efficiency and economical efficiency of mass production. Such a photovoltaic device is produced by forming a first metal oxide film on a metal member by non-reactive sputtering, forming a second metal oxide film on the first metal oxide film by reactive sputtering, and forming a semiconductor on the second metal oxide film.