The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 1997
Filed:
Mar. 18, 1996
Applicant:
Inventors:
Mineo Nishi, Kitakyushu, JP;
Tadashi Teramoto, Kitakyushu, JP;
Assignee:
Mitsubishi Chemical Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
C09D / ; C09D / ; G03L / ; G03L / ;
U.S. Cl.
CPC ...
10628726 ; 10628728 ; 4302731 ; 430325 ;
Abstract
A composition for an anti-reflective coating on resist, which comprises a water-soluble fluorine compound and water as the main components, wherein the water-soluble fluorine compound contains (A) a water-soluble fluorine compound that is solid at 20.degree. C., 1 atmospheric pressure, and (B) a water-soluble fluorine compound that is liquid at 20.degree. C., 1 atmospheric pressure and that has a boiling point of at least 100.degree. C. under 1 atmospheric pressure.
Nishi, Mineo. (1997). Composition for anti-reflective coating on resist (U.S. Patent No. 5611850). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5611850
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile