The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 1997
Filed:
Jul. 10, 1995
Nicholas Allen, Bedford, MA (US);
Abdu Broudour, West Newton, MA (US);
Sergey Broude, Newton Centre, MA (US);
Eric Chase, Carlisle, MA (US);
Carl Johnson, Tewksbury, MA (US);
Pascal Miller, North Chelmsford, MA (US);
Jay Ormsby, Salem, MA (US);
Arkady Savikovsky, Brookline, MA (US);
QC Optics, Inc., Burlington, MA (US);
Abstract
A system for detecting displacement of a surface in a direction normal to the surface, the system including a first grating; a second grating; an optical subsystem for projecting an image of the first grating onto the surface and for directing a secondary image of the first grating reflected off the surface onto the second grating; and a detector, responsive to the fringe pattern formed after the secondary image passes through the second grating, for detecting displacement of the surface in a direction normal to the surface.