The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 1997
Filed:
Mar. 20, 1995
Applicant:
Inventor:
Johan F Prins, Northcliff, Johannesburg, ZA;
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ; B05D / ; H01L / ; B01J / ;
U.S. Cl.
CPC ...
427523 ; 427531 ; 427113 ; 423446 ; 437173 ;
Abstract
A method of doping diamond with relatively large atoms such as aluminium, phosphorus, arsenic and antimony is provided. The method involves implanting the dopant atoms at a low temperature to create a damaged region of point defects in the form of vacancies and interstitial dopant atoms within the crystal lattice of the diamond, and annealing the diamond to reduce the lattice damage and cause dopant interstitial atoms to diffuse into lattice positions. The implantation dose will be low and such as to create density of implanted dopant atoms of no greater than 2.5.times.10.sup.18 cm.sup.3.