The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 1997
Filed:
May. 26, 1994
Applicant:
Inventors:
Assignee:
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Primary Examiner:
Int. Cl.
CPC ...
G11B / ; C23C / ; B05D / ;
U.S. Cl.
CPC ...
4286 / ; 4286 / ; 4286 / ; 4286 / ; 4286 / ; 4286 / ; 4286 / ; 4286 / ; 428692 ; 428702 ; 428900 ; 2041921 ; 20419211 ; 20419214 ; 20419215 ; 2041922 ; 20419226 ; 427128 ; 427595 ; 427599 ; 252 / ; 252 6256 ; 252 / ; 369 13 ;
Abstract
An oxide film having, for example, a spinel structure is deposited on a substrate, and ions of an inert gas such as He, Ar, Ne, Kr, or Xe, oxygen gas ions, or metal ion of a film constituting element are radiated onto the film during deposition, thereby to obtain an oxide thin film in which a specific crystal direction is oriented.