The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 1997
Filed:
Nov. 15, 1995
Applicant:
Inventors:
Assignee:
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G04B / ;
U.S. Cl.
CPC ...
428461 ; 428336 ; 428457 ; 428698 ; 428704 ; 501 96 ; 501 98 ;
Abstract
Proposed is an article of pyrolytic boron nitride such as crucibles for use at a high temperature under an extremely high vacuum as in the molecular beam epitaxy. The article can be used in the high temperature, high vacuum process without the conventional elaborate and time-consuming degassing bake-out treatment because the article is wrapped in a wrapping film having a specified low moisture permeability immediately after a preliminary degassing treatment under specified conditions before the article is wrapped under a low-moisture atmosphere in a glove box.