The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 1997
Filed:
Oct. 31, 1994
Applicant:
Inventors:
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B67C / ;
U.S. Cl.
CPC ...
141 21 ; 141-2 ; 141-5 ; 141 59 ; 141 65 ; 141 67 ; 141198 ; 137205 ; 137209 ;
Abstract
A non-venting hazardous material liquid dispensing system (25) includes a removable supply vessel (7) coupled to a gas source (1) and a permanent buffer vessel (11). The permanent buffer vessel (11) is additionally coupled through a suction pump (14) to the removable supply vessel (7). The suction pump (14) suctions pressure off the permanent supply vessel (11), transferring the pressure to removable supply vessel (7). The transfer of pressure causes hazardous material liquid (34) to be drawn from the removable supply vessel (7) into permanent buffer vessel (11). The permanent buffer vessel (11) dispenses hazardous material liquid (34) to a process tool.