The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 1997
Filed:
Mar. 29, 1995
Applicant:
Inventors:
Peter G Borden, San Mateo, CA (US);
Derek G Aqui, San Jose, CA (US);
Assignee:
High Yield Technology, Inc., Sunnyvale, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
356364 ; 356338 ; 606 11 ;
Abstract
A structure and a method provide a quasi bright field particle sensor, using a laser beam of predetermined polarization. A phase shift caused by a particle passing through a laser beam is utilized to detect the presence of a particle. In one embodiment, the laser beam is split into two components of laser beams of orthogonal polarization separated by a predetermined distance, so as to allow detection of both spherical and non-spherical particles. In another embodiment, where only non-spherical particles are detected, a single laser beam is used.